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Technical data: |
PVD – Box Coater Satis 725 with Macro-Tech PC control
This is a second-hand plant.
The plant was about 1 year in the eyeglass production and is in use as AS NEW
to call!
There were only broadband AR-coatings on this remote facility.
(cold and hot processes for plastics and glass)
Macro-tech VBA3 for control, visualization and process control
-- Software for controlling the vacuum evaporation of the fully automatic operation,
Users easily editable recipes and steps in the process.
-- Password protected operating levels semiautomatic and manual operation of the plant
on investments charts as well as direct access to the control and regulation parameters
Integration of all components of the system such as:
Electron beam evaporators, shuttles evaporator, quarz cristall monitor controller
Substrate heater, vacuum pumping station, vacuum-measurement, actuator, etc.
-- Windows XP compatible software for visualization of the system parameters and process control
Operation of the plant through a graphical user interface for entering system parameters
and system constants as well as direct access to all steering and control functions
-- Direct control of all process parameters such as:
Electron beam deflection, sweep patterns, rate control, heating controls, layer thickness, etc.
-- Event and error log in plain text, software to process logging, data collection
and data visualization, automatic log pages of documentation
Expiry process (printer or Excel table)
-- Windows XP Professional operating system with real-time operating system
Industrial PC to control
19 `` industrial PC chassis with 250W power supply, fan and BUS system
2 pieces 17 `` TFT monitor
2 Moeller Profibus I / O nodes
Rank cabinet with complete control electronics High Voltage ...
Rittal 19 cabinet rank to absorb the control hardware
with keyboard drawer and 2 pieces 17 `` TFT color screens
Complete CE-compliant wiring of the control hardware, the input / output
are accessible on a terminal set up.
Performance and network distribution and operation cabels to operate with IPC - System
Power Distribution cabinet WxHxD about 1200 x 2000 x 500 mm with all the operation of the plant
necessary switching and security elements, as well as security and NOT FROM circles.
Vacuum and Process Systems
Vacuum chamber (recipient):
-- 4 - pot hole electron beam evaporator source
-- High voltage power supply type Temescal Simba
-- Electron beam evaporator pot with electronics control unit
-- 1 thermal evaporator (evaporator, boats, etc.)
-- Rate Controller SQM-242 for connection of up to 4 xthal´s,
-- 2-specialist quarz crystalcontrol,(measurement of the film thickness)
-- 2 pieces evaporator sources shutter with pneumatic actuator and end position switch
-- Substrate heater with 3 heating circuits, 1 thermocouple for temperature measurement
-- Rotary drive with step-free speed control
-- Dome as substrate holder
-- MFC Gas Controler (for reactive processes and materials)
Vacuum production:
-- Two rotary vane pump
-- Oil diffusion pump as high vacuum pump
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